TY  - CONF
AU  - Kristen, 
AU  - Sobolewski, Mark
C2  - Characterization and Metrology for ULSI Technology Conference
DA  - 1998-01-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology Conference
PY  - 1998
TI  - Spatial Uniformity in Chamber-Cleaning Plasmas Measured Using Planar Laser-Induced Fluorescence
ER  -