TY - JOUR AU - Muralikrishnan, Balasubramanian AU - Stone, Jack AU - Shakarji, Craig AU - Stoup, John C2 - Measurement Science & Technology DA - 2012-01-05 LA - en PB - Measurement Science & Technology PY - 2012 TI - Performing three dimensional measurements on micro-scale features using a flexible CMM fiber probe with ellipsoidal tip UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909420 ER -