TY  - CONF
AU  - Hendricks, Jay
AU  - Aquino-Class, M
AU  - Zachariah, Michael
C2  - The 19th Proceedings of the Electrochemical Society
DA  - 1998-11-01
LA  - en
M1  - MA 98-2
PB  - The 19th Proceedings of the Electrochemical Society
PY  - 1998
TI  - Thin Film Growth of Titanium and Titanium Nitride Via Gas-Phase Reaction of Sodium Vapor With Titanium Tetrachloride
ER  -