TY  - CONF
AU  - Kreider, Kenneth
AU  - Kimes, William
AU  - Meyer, Christopher
AU  - Ripple, Dean
AU  - Tsai, Benjamin
AU  - Chen, D
AU  - DeWitt, D
C2  - Eighth International Temperature Symposium | 8th | Temperature Its Measurement and Control in Science and Industry, Volume Seven | AIP
DA  - 2003-10-01
LA  - en
PB  - Eighth International Temperature Symposium | 8th | Temperature Its Measurement and Control in Science and Industry, Volume Seven | AIP
PY  - 2003
TI  - Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples
ER  -