TY  - JOUR
AU  - Sobolewski, Mark
AU  - Olthoff, James
AU  - Wang, Yicheng
C2  - Journal of Applied Physics
DA  - 1999-04-01
LA  - en
M1  - 85
PB  - Journal of Applied Physics
PY  - 1999
TI  - Ion Energy Distributions and Sheath Voltages in Radio-Frequency-Biased, Inductively-Coupled, High-Density Plasma Reactor
ER  -