TY - CONF AU - Stone, Jack AU - Muralikrishnan, Balasubramanian AU - Stoup, John C2 - Proceedings of SPIE, San Diego, CA DA - 2005-08-01 LA - en M1 - 5879 PB - Proceedings of SPIE, San Diego, CA PY - 2005 TI - A Fiber Probe for CMM Measurements of Small Features ER -