TY  - JOUR
AU  - Kreider, Kenneth
AU  - Allen, David
AU  - Chen, D
AU  - DeWitt, D
AU  - Meyer, Christopher
AU  - Tsai, Benjamin
C2  - International Conference on the Electro Chemical Society
DA  - 2002-05-01
LA  - en
M1  - 1
PB  - International Conference on the Electro Chemical Society
PY  - 2002
TI  - Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools
ER  -