TY  - CONF
AU  - Kreider, Kenneth
AU  - Allen, David
AU  - Chen, D
AU  - DeWitt, D
AU  - Meyer, Christopher
AU  - Tsai, Benjamin
C2  - Advanced Thermal Processing of Semiconductors, International Conference | 9th | | IEEE
DA  - 2001-09-01
LA  - en
M1  - 2001
PB  - Advanced Thermal Processing of Semiconductors, International Conference | 9th | | IEEE
PY  - 2001
TI  - Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools
ER  -