TY  - CONF
AU  - Barnes, Bryan
AU  - Goasmat, Francois
AU  - Sohn, Martin
AU  - Zhou, Hui
AU  - Silver, Richard
AU  - Vladar, Andras
AU  - Arceo, Abraham
C2  - Proceedings of the SPIE, San Jose, CA
DA  - 2014-04-02
DO  - https://doi.org/10.1117/12.2048231
LA  - en
M1  - 9050
PB  - Proceedings of the SPIE, San Jose, CA
PY  - 2014
TI  - Optical volumetric inspection of sub-20 nm patterned defects with wafer noise
ER  -