TY  - CONF
AU  - Maslar, James
AU  - Davis, R
AU  - Moore, Elizabeth
AU  - Burgess, Donald
AU  - Kremer, D
AU  - Ehrman, S
C2  - Electrochemical Society, Meeting | 199th | | Electrochemical Society
DA  - 2001-03-01
LA  - en
M1  - 2001-1
PB  - Electrochemical Society, Meeting | 199th | | Electrochemical Society
PY  - 2001
TI  - In Situ Gas Phase Optical Measurements of Silane Decomposition in a Thermal Chemical Vapor Deposition Reactor
ER  -