TY  - CONF
AU  - Kreider, Kenneth
AU  - DeWitt, D
AU  - Meyer, Christopher
AU  - Scheuerman, Vincent
C2  - 8th International Symposium on Advanced Thermal Processing of Semiconductors
DA  - 2000-04-01
LA  - en
PB  - 8th International Symposium on Advanced Thermal Processing of Semiconductors
PY  - 2000
TI  - Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 C
ER  -