TY - CONF AU - Benkstein, Kurt AU - Montgomery, Christopher AU - Vaudin, Mark AU - Semancik, Stephen C2 - Semiconductor Materials for Sensing, Symposium on | | Semiconductor Materials for Sensing | Materials Research Society DA - 2005-01-01 LA - en M1 - 828 PB - Semiconductor Materials for Sensing, Symposium on | | Semiconductor Materials for Sensing | Materials Research Society PY - 2005 TI - The Development and Evaluation of TiO2 Nanoparticle Films for Conductometric Gas Sensing on MEMS Microhotplate Platforms ER -