TY  - CONF
AU  - Scott, J
C2  - International Conference on Characterization and Metrology for ULSI Technology | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - International Conference on Characterization and Metrology for ULSI Technology | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP
PY  - 2003
TI  - Determination of Factors Affecting HRTEM Gate Dielectric Thickness Measurement Uncertainty
ER  -