TY  - JOUR
AU  - Sobolewski, Mark
AU  - Wang, Yicheng
AU  - Goyette, A
C2  - Journal of Applied Physics
DA  - 2002-05-01
LA  - en
M1  - 91
PB  - Journal of Applied Physics
PY  - 2002
TI  - Measurements and Modeling of Ion Energy Distributions in High-Density, Radio-Frequency Biased CF<sub>4</sub> Discharges
ER  -