TY  - JOUR
AU  - Farrow, R
AU  - Postek, Michael
AU  - Keery, William
AU  - Jones, Samuel
AU  - Lowney, J
AU  - Blakey, M
AU  - Fetter, L
AU  - Griffith, J
AU  - Liddle, J
AU  - Hopkins, L
AU  - Huggins, H
AU  - Peabody, M
AU  - Novembre, A
C2  - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
DA  - 1997-11-01
LA  - en
M1  - 15(6)
PB  - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PY  - 1997
TI  - Application of Transmission Electron Detection to SCALPEL Mask Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=820894
ER  -