TY  - GEN
AU  - Allen, Robert
AU  - Pellegrino, J
AU  - Monk, D
AU  - Teague, E
AU  - Swyt, Dennis
AU  - Fu, Joseph
AU  - Silver, Richard
AU  - Vorburger, Theodore
AU  - Damazo, Bradley
AU  - Russell, Robert
AU  - Wheatley, Thomas
AU  - Stouffer, Keith
AU  - Osti, Manfred
AU  - Wilmering, David
AU  - Rhorer, Richard
AU  - Sriram, Ram
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2002-01-01
DO  - https://doi.org/10.6028/NIST.IR.6850
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2002
TI  - Nanomanufacturing of Atom-Based Dimensional Standards - A Final Project Report of the NAMT
ER  -