TY  - CONF
AU  - Dixson, Ronald
AU  - Koning, R
AU  - Vorburger, Theodore
AU  - Fu, Joseph
AU  - Tsai, V
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1998-06-01
LA  - en
M1  - 3332
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1998
TI  - Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope
ER  -