TY  - CONF
AU  - Dongmo, Samuel
AU  - Villarrubia, John
AU  - Jones, Samuel
AU  - Renegar, Thomas
AU  - Postek, Michael
AU  - Song, Jun-Feng
C2  - Characterization and Metrology for ULSI Technology 1998 International Conference
DA  - 1998-03-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology 1998 International Conference
PY  - 1998
TI  - Tip Characterization for Scanned Probe Microscope Width Metrology
ER  -