TY  - CONF
AU  - Marx, Egon
AU  - Malik, I
AU  - Bristow, T
AU  - Poduje, N
AU  - Stover, J
C2  - Proceedings of 2000 International Conference on Characterization and Metrology
DA  - 2000-01-01
LA  - en
PB  - Proceedings of 2000 International Conference on Characterization and Metrology
PY  - 2000
TI  - Power Spectral Density Functions for Si Wafer Surfaces Using Six Measurement Techniques
ER  -