TY  - CONF
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Lowney, J
AU  - Postek, Michael
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA
DA  - 2002-07-01
LA  - en
M1  - 4689
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA
PY  - 2002
TI  - Scanning Electron Microscope Analog of Scatterometry
ER  -