TY  - CONF
AU  - Villarrubia, John
AU  - Dixson, Ronald
AU  - Jones, Samuel
AU  - Lowney, J
AU  - Postek, Michael
AU  - Allen, Richard
AU  - Cresswell, Michael
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor
DA  - 1999-06-01
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor
PY  - 1999
TI  - Intercomparison of SEM, AFM, and Electrical Linewidths
ER  -