TY  - CONF
AU  - Kramar, John
AU  - Jun, Jay
AU  - Penzes, William
AU  - Scire, Fredric
AU  - Teague, E
AU  - Villarrubia, John
C2  - Proceedings of SPIE,, Denver, CO
DA  - 1999-11-01
LA  - en
M1  - 3806
PB  - Proceedings of SPIE,, Denver, CO
PY  - 1999
TI  - Grating Pitch Measurements With the Molecular Measuring Machine
ER  -