TY  - JOUR
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Lowney, J
AU  - Jones, Samuel
AU  - Postek, Michael
C2  - Scanning
DA  - 2000-05-01
LA  - en
M1  - 22(2)
PB  - Scanning
PY  - 2000
TI  - Applications of SEM Monte Carlo Modeling to Geometry Determination in Single-Crystal Silicon Test Patterns
ER  -