TY  - JOUR
AU  - Dixson, Ronald
AU  - Guerry, Angela
AU  - Bennett, Marylyn
AU  - Vorburger, Theodore
AU  - Postek, Michael
C2  - Proceedings of SPIE
DA  - 2002-01-01
LA  - en
M1  - 4689
PB  - Proceedings of SPIE
PY  - 2002
TI  - Toward Traceability for At Line AFM Dimensional Metrology
ER  -