TY  - VIDEO
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Postek, Michael
C2  - SEMATECH
DA  - 2001-11-01
LA  - en
PB  - SEMATECH
PY  - 2001
TI  - Trial Shape-Sensitive Linewidth Measurement System
ER  -