TY  - JOUR
AU  - Postek, Michael
AU  - Vladar, Andras
AU  - Lowney, J
AU  - Keery, William
C2  - Scanning
DA  - 2002-07-01
LA  - en
M1  - 24
PB  - Scanning
PY  - 2002
TI  - Two-Dimensional Simulation and Modeling in Scanning Electron Microscope Imaging and Metrology Research
ER  -