TY  - VIDEO
AU  - Villarrubia, John
AU  - Dixson, Ronald
AU  - Jones, Samuel
AU  - Lowney, J
AU  - Postek, Michael
C2  - Transfer Document; NIST/SEMATECH Proprietary
DA  - 2000-01-01
LA  - en
PB  - Transfer Document; NIST/SEMATECH Proprietary
PY  - 2000
TI  - Final Report: 1998-1999 NIST/SEMATECH Project on Intercomparison of Linewidth Measurement Methods
ER  -