TY  - CONF
AU  - Dixson, Ronald
AU  - Koning, R
AU  - Fu, Joseph
AU  - Vorburger, Theodore
AU  - Renegar, Thomas
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA
DA  - 2000-06-01
LA  - en
M1  - 3998
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA
PY  - 2000
TI  - Accurate Dimensional Metrology With Atomic Force Microscopy
ER  -