TY - JOUR AU - Shaw, Gordon AU - Kramar, John AU - Pratt, Jon C2 - Experimental Mechanics DA - 2006-09-14 LA - en M1 - 47 (1) PB - Experimental Mechanics PY - 2006 TI - SI-Traceable Spring Constant Calibration of Microfabricated Cantilevers for Small Force Measurement UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822356 ER -