TY  - CONF
AU  - Silver, Richard
AU  - Attota, Ravikiran
AU  - Stocker, Michael
AU  - Jun, Jay
AU  - Marx, Egon
AU  - Larrabee, Robert
AU  - Russo, B
AU  - Davidson, M
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA
DA  - 2002-07-01
LA  - en
M1  - 4689
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA
PY  - 2002
TI  - Comparison of Measured Optical Image Profiles of Silicon Lines with Two Different Theoretical Models
ER  -