TY  - CONF
AU  - Vladar, Andras
AU  - Villarrubia, John
AU  - Postek, Michael
C2  - Metrology, Inspection and Process Control for Microlithography | 17th | Metrology, Inspection and Process Control for Microlithography XVII | SPIE
DA  - 2003-06-01
LA  - en
M1  - 5038
PB  - Metrology, Inspection and Process Control for Microlithography | 17th | Metrology, Inspection and Process Control for Microlithography XVII | SPIE
PY  - 2003
TI  - A New Way of Handling Dimensional Meaurement Results for Integrated Circuit Technology
ER  -