TY  - CONF
AU  - Yuan, Y
AU  - Song, Jun-Feng
AU  - Vorburger, Theodore
C2  - International Conference and General Meeting of European Society for Precision Engineering and Nanotechnology, Bremen, GE
DA  - 1999-05-31
LA  - en
PB  - International Conference and General Meeting of European Society for Precision Engineering and Nanotechnology, Bremen, GE
PY  - 1999
TI  - High Accuracy High Speed Gaussian Filter in Surface Metrology
ER  -