TY  - CONF
AU  - Kramar, John
AU  - Amatucci, E
AU  - Gilsinn, David
AU  - Jun, Jay
AU  - Penzes, William
AU  - Scire, Fredric
AU  - Teague, E
AU  - Villarrubia, John
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1999-06-01
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1999
TI  - Toward Nanometer Accuracy Measurements
ER  -