TY  - CONF
AU  - Orji, Ndubuisi
AU  - Raja, Jayaraman
AU  - Vorburger, Theodore
AU  - Gu, Xiaohong
C2  - American Society for Precision Engineering, Annual Meeting | 18th | Proceedings of ASPE 18th Annual Meeting | American Society for Precision Engineering
DA  - 2003-10-01
LA  - en
PB  - American Society for Precision Engineering, Annual Meeting | 18th | Proceedings of ASPE 18th Annual Meeting | American Society for Precision Engineering
PY  - 2003
TI  - Space-Scale Analysis of Line Edge Roughness on 193 nm Lithography Test Structures
ER  -