TY  - CONF
AU  - Dagata, John
AU  - Chien, F
AU  - Gwo, S
AU  - Morimoto, K
AU  - Inoue, T
AU  - Itoh, J
AU  - Yokoyama, H
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
DA  - 2001-08-01
LA  - en
M1  - 4344
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
PY  - 2001
TI  - Electric Force Microscopy with a Single Carbon Nanotube Tip
ER  -