TY  - CONF
AU  - Dixson, Ronald
AU  - Orji, Ndubuisi
AU  - Fu, Joseph
AU  - Tsai, V
AU  - E., 
AU  - Vorburger, Theodore
AU  - Edwards, H
AU  - Cook, D
AU  - West, P
AU  - Nyffenegger, R
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
DA  - 2001-08-01
LA  - en
M1  - 4344
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
PY  - 2001
TI  - Silicon Single Atom Steps as AFM Height Standards
ER  -