TY  - CONF
AU  - Kramar, John
AU  - Jun, Jay
AU  - Penzes, William
AU  - Scire, Fredric
AU  - Teague, E
AU  - Villarrubia, John
C2  - Proceedings of the EUSPEN Topical Conference on Fabrication and Metrology in Nanotechnology, Copenhagen, DE
DA  - 2000-05-01
LA  - en
M1  - 1
PB  - Proceedings of the EUSPEN Topical Conference on Fabrication and Metrology in Nanotechnology, Copenhagen, DE
PY  - 2000
TI  - Molecular Measuring Machine Design and Measurements
ER  -