TY  - CONF
AU  - Silver, Richard
AU  - Doiron, Theodore
AU  - Penzes, William
AU  - Fox, S
AU  - Kornegay, Edward
AU  - Rathjen, S
AU  - Takac, M
AU  - Owen, D
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1999-06-01
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1999
TI  - Two-Dimensional Calibration Artifact and Measurement Methodology
ER  -