TY  - CONF
AU  - Dixson, Ronald
AU  - Guerry, Angela
C2  - Proceedings of SPIE, Santa Clara, CA
DA  - 2004-05-24
LA  - en
M1  - 5375
PB  - Proceedings of SPIE, Santa Clara, CA
PY  - 2004
TI  - Reference Metrology Using a Next Generation CD-AFM
ER  -