TY  - CONF
AU  - Dixson, Ronald
AU  - Koning, R
AU  - Tsai, V
AU  - Fu, Joseph
AU  - Vorburger, Theodore
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
DA  - 1999-06-01
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA
PY  - 1999
TI  - Dimensional Metrology with the NIST Calibrated Atomic Force Microscope
ER  -