TY  - CONF
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Lowney, J
AU  - Postek, Michael
AU  - Allen, Richard
AU  - Cresswell, Michael
AU  - Ghoshtagore, Rathindra
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA
DA  - 2000-06-01
LA  - en
M1  - 3998
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA
PY  - 2000
TI  - Linewidth Measurement Intercomparison on a BESOI Sample
ER  -