TY  - GEN
AU  - Marchiando, Jay
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1989-07-01
LA  - en
M1  - 400
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1989
TI  - Semiconductor Measurement Technology: A Software Program for Aiding the Analysis of Ellipsometric Measurements, Simple Models
ER  -