TY  - CONF
AU  - Gaitan, Michael
C2  - Proc., 6th International Micromachine Symposium, Tokyo, JA
DA  - 2000-12-31
LA  - en
PB  - Proc., 6th International Micromachine Symposium, Tokyo, JA
PY  - 2000
TI  - MEMS Standardization
ER  -