TY  - CONF
AU  - Potzick, James
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control, San Jose, CA
DA  - 1990-12-31
LA  - en
M1  - 1261
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control, San Jose, CA
PY  - 1990
TI  - Practical Photomask Linewidth Measurement
ER  -