TY  - CONF
AU  - Day, Gordon
C2  - Proc., SPIE, Conf. on Design, Fabrication, and Characterization of Photonic Devices,, Singapore, SN
DA  - 1999-12-01
LA  - en
M1  - 3896
PB  - Proc., SPIE, Conf. on Design, Fabrication, and Characterization of Photonic Devices,, Singapore, SN
PY  - 1999
TI  - Metrology for Optoelectronics
ER  -