TY  - CONF
AU  - Postek, Michael
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control, Santa Clara, CA
DA  - 1987-12-31
LA  - en
M1  - 775
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control, Santa Clara, CA
PY  - 1987
TI  - Submicrometer Dimensional Metrology in the Scanning Electron Microscope
ER  -