TY - GEN AU - Rennex, Brian C2 - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD DA - 1994-09-09 LA - en PB - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD PY - 1994 TI - Standard Reference Materials: Certification of a Standard Reference Material for the Determination of Interstitial Oxygen Concentration in Semiconductor Silicon by Infrared Spectrophotometry ER -