TY  - CONF
AU  - You, Lin
AU  - Hitz, Emily
AU  - Ahn, Jungjoon
AU  - Obeng, Yaw
AU  - Kopanski, Joseph
C2  - 2013 International Semiconductor Device Research Symposium, Bethesda, MD
DA  - 2013-12-13
LA  - en
PB  - 2013 International Semiconductor Device Research Symposium, Bethesda, MD
PY  - 2013
TI  - Back-End-of-Line Test Structure Design and Simulation for Subsurface Metrology with Scanning Probe Microscopy
ER  -