TY  - CONF
AU  - Knight, Stephen
C2  - GOMAC Tech-: Countering Asymmetric Threats, Tampa, FL
DA  - 2003-04-04
LA  - en
M1  - 1
PB  - GOMAC Tech-: Countering Asymmetric Threats, Tampa, FL
PY  - 2003
TI  - Overview of Metrology for the Semiconductor Industry at the National Institute of Standards and Technology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31263
ER  -