TY  - CONF
AU  - Laabs, Holger
AU  - Jones, Richard
AU  - Dowell, Marla
C2  - NEWRAD 2002, Gaithersburg, MD
DA  - 2002-05-01
LA  - en
PB  - NEWRAD 2002, Gaithersburg, MD
PY  - 2002
TI  - Dose Meter Calibration System for 193 nm
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30760
ER  -